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激光驱动微滴打印是一种高分辨率、高柔性和材料适应性广的金属微增材制造工艺，能实现纯金属微结构打印。面向电路微导线打印，目前的激光驱动微滴沉积工艺规律认识还不清晰。因此基于纳秒光纤激光驱动微滴打印系统，实现了直径5 μm的铜微滴阵列的沉积，沉积位置偏差为±5 μm。研究不同工艺参数下的激光驱动微滴沉积微导线形貌，发现由于存在微滴沉积位置偏差，交替沉积策略比微滴顺序沉积更适合打印微导线；当沉积微滴搭接间距减至1.5 μm时，可形成联通的导线打印；微滴转移间距从50 μm增至200 μm，打印微导线的线宽增加约2倍；实现线宽为15 μm的微导线打印，并通过四探针法测试获得的微导线电阻率为实体材料的9倍。
Abstract：Laser-induced forward transfer(LIFT) is a metal micro-additive manufacturing process with high resolution,high flexibility,and wide material adaptability,and can achieve the printing of pure metal microstructures base on a nanosecond fiber laser driven micro droplet printing system,which achieves the deposition of a 5 μm diameter copper micro droplet array with a deposition position deviation of ±5 μm. By studying the morphology of laser driven micro droplet deposition micro wires under different process parameters,it found that due to the existence of positional deviation of micro droplet deposition,the alternating deposition strategy is more suitable for printing micro wires than the sequential deposition of micro droplets. With the overlap size decrease to 1.5 μm,a continuity wireline was printed. In addition,as the transfer spacing of micro droplets increases from 50 μm to 200 μm,the line width of printed micro wires increases by about twice. Finally,a 15 μm line width micro wire printing was achieved,and the electrical resistivity of the micro wire was obtained to be 9 times that of the solid material through four probe testing.
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基本信息:
中图分类号:TP391.73
引用信息:
[1]陈萌,赵以时,罗国虎,等.电路微导线激光驱动微滴喷射沉积打印[J].电加工与模具,2024,No.384(05):54-58.
基金信息:
国家自然科学基金项目（52205488）; 中国航天科技集团有限公司空间结构与机构技术实验室开放课题基金项目（22GFH-HT01-225）
2024-10-20
2024-10-20